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Forum on Tracking Detector Mechanics / LHCb VELO Microchannel cooling

The material budget of the pixel modules is minimised by the use of evaporative CO2 coolant circulating in microchannels within 400 μm thick silicon substrates. Microchannel cooling brings many advantages: very efficient heat transfer with almost no temperature gradients across the module, no CTE mismatch with silicon components, and low material contribution. This is a breakthrough technology developed for LHCb; the microchannel plates will be inaccessible once the run begins and must be capable of operation in vacuum and to reliably withstand up to 200 bar pressure. The development has been carried out hand in hand with industry and has required many specialised quality control techniques, as well as a novel fluxless soldering technique to attach the connectors to the microchannel plates to allow the delivery of the coolant. The production of the first complete set of 52 microchannel plates will be described, highlighting the way in which the perfection of the cooling channels, bonding and surface quality has been maintained over the large area plates, how the construction is achieved, and the performance of the microchannel plates when fully loaded with heat dissipating electronics.

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